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C-axis orientated AlN films deposited using deep oscillation magnetron sputtering

Research article (Applied Surface Science, 2016) · cited 34× · AI/ML
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C-axis orientated AlN films deposited using deep oscillation magnetron sputtering

Summary

C-axis orientated AlN films deposited using deep oscillation magnetron sputtering is a scholarly article[1].

Key Facts

  • C-axis orientated AlN films deposited using deep oscillation magnetron sputtering's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). C-axis orientated AlN films deposited using deep oscillation magnetron sputtering. Retrieved May 24, 2026, from https://4ort.xyz/entity/c-axis-orientated-aln-films-deposited-using-deep-oscillation-magnetron-sputtering
MLA “C-axis orientated AlN films deposited using deep oscillation magnetron sputtering.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/c-axis-orientated-aln-films-deposited-using-deep-oscillation-magnetron-sputtering.
BibTeX @misc{4ortxyz_c-axis-orientated-aln-films-deposited-using-deep-oscillation-magnetron-sputtering_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{C-axis orientated AlN films deposited using deep oscillation magnetron sputtering}}, year = {2026}, url = {https://4ort.xyz/entity/c-axis-orientated-aln-films-deposited-using-deep-oscillation-magnetron-sputtering}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): C-axis orientated AlN films deposited using deep oscillation magnetron sputtering — https://4ort.xyz/entity/c-axis-orientated-aln-films-deposited-using-deep-oscillation-magnetron-sputtering (retrieved 2026-05-24)

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