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Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System
Research article (IEEE Transactions on Control Systems Technology, 2018) · cited 26× · AI/ML
Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System
Summary
Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System is a scholarly article[1].
Key Facts
Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System. Retrieved May 24, 2026, from https://4ort.xyz/entity/beyond-performance-cost-tradeoffs-in-motion-control-a-multirate-feedforward-design-with-application-to-a-dual-stage-wafe
MLA“Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/beyond-performance-cost-tradeoffs-in-motion-control-a-multirate-feedforward-design-with-application-to-a-dual-stage-wafe.
BibTeX@misc{4ortxyz_beyond-performance-cost-tradeoffs-in-motion-control-a-multirate-feedforward-design-with-application-to-a-dual-stage-wafe_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System}}, year = {2026}, url = {https://4ort.xyz/entity/beyond-performance-cost-tradeoffs-in-motion-control-a-multirate-feedforward-design-with-application-to-a-dual-stage-wafe}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System — https://4ort.xyz/entity/beyond-performance-cost-tradeoffs-in-motion-control-a-multirate-feedforward-design-with-application-to-a-dual-stage-wafe (retrieved 2026-05-24)
