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Automatic layout feature extraction for lithography hotspot detection based on deep neural network

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 45× · AI/ML
academia openalex:W2302532728
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Automatic layout feature extraction for lithography hotspot detection based on deep neural network

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Automatic layout feature extraction for lithography hotspot detection based on deep neural network is a scholarly article[1].

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  • Automatic layout feature extraction for lithography hotspot detection based on deep neural network's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Automatic layout feature extraction for lithography hotspot detection based on deep neural network. Retrieved May 24, 2026, from https://4ort.xyz/entity/automatic-layout-feature-extraction-for-lithography-hotspot-detection-based-on-deep-neural-network
MLA “Automatic layout feature extraction for lithography hotspot detection based on deep neural network.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/automatic-layout-feature-extraction-for-lithography-hotspot-detection-based-on-deep-neural-network.
BibTeX @misc{4ortxyz_automatic-layout-feature-extraction-for-lithography-hotspot-detection-based-on-deep-neural-network_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Automatic layout feature extraction for lithography hotspot detection based on deep neural network}}, year = {2026}, url = {https://4ort.xyz/entity/automatic-layout-feature-extraction-for-lithography-hotspot-detection-based-on-deep-neural-network}, note = {Accessed: 2026-05-24}}
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