Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Automatic correction of lithography hotspots with a deep generative model. Retrieved May 24, 2026, from https://4ort.xyz/entity/automatic-correction-of-lithography-hotspots-with-a-deep-generative-model
MLA“Automatic correction of lithography hotspots with a deep generative model.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/automatic-correction-of-lithography-hotspots-with-a-deep-generative-model.
BibTeX@misc{4ortxyz_automatic-correction-of-lithography-hotspots-with-a-deep-generative-model_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Automatic correction of lithography hotspots with a deep generative model}}, year = {2026}, url = {https://4ort.xyz/entity/automatic-correction-of-lithography-hotspots-with-a-deep-generative-model}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Automatic correction of lithography hotspots with a deep generative model — https://4ort.xyz/entity/automatic-correction-of-lithography-hotspots-with-a-deep-generative-model (retrieved 2026-05-24)
