AlN-on-SOI platform-based micro-machined hydrophone
Research article (Applied Physics Letters, 2016) · cited 64× · AI/ML
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- [2] ↑ AlN-on-SOI platform-based micro-machined hydrophone — instance of (P31): scholarly article. wikidata.org.
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@misc{4ortxyz_aln-on-soi-platform-based-micro-machined-hydrophone_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{AlN-on-SOI platform-based micro-machined hydrophone}}, year = {2026}, url = {https://4ort.xyz/entity/aln-on-soi-platform-based-micro-machined-hydrophone}, note = {Accessed: 2026-05-24}}
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