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Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks
Research article (Journal of Process Control, 2017) · cited 88× · AI/ML
Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks
Summary
Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks is a scholarly article[1].
Key Facts
Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks. Retrieved May 24, 2026, from https://4ort.xyz/entity/adaptive-virtual-metrology-for-semiconductor-chemical-mechanical-planarization-process-using-gmdh-type-polynomial-neural
MLA“Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/adaptive-virtual-metrology-for-semiconductor-chemical-mechanical-planarization-process-using-gmdh-type-polynomial-neural.
BibTeX@misc{4ortxyz_adaptive-virtual-metrology-for-semiconductor-chemical-mechanical-planarization-process-using-gmdh-type-polynomial-neural_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks}}, year = {2026}, url = {https://4ort.xyz/entity/adaptive-virtual-metrology-for-semiconductor-chemical-mechanical-planarization-process-using-gmdh-type-polynomial-neural}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks — https://4ort.xyz/entity/adaptive-virtual-metrology-for-semiconductor-chemical-mechanical-planarization-process-using-gmdh-type-polynomial-neural (retrieved 2026-05-24)
