Accurate prediction of EUV lithographic images and 3D mask effects using generative networks

Research article (Journal of Micro/Nanopatterning Materials and Metrology, 2021) · cited 20× · AI/ML

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Accurate prediction of EUV lithographic images and 3D mask effects using generative networks

Summary

Accurate prediction of EUV lithographic images and 3D mask effects using generative networks is a scholarly article^[1].

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Accurate prediction of EUV lithographic images and 3D mask effects using generative networks's instance of is recorded as scholarly article^[2].

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Direct Wikidata claims

[2] ↑ Accurate prediction of EUV lithographic images and 3D mask effects using generative networks — instance of (P31): scholarly article. wikidata.org.

Class ancestry

[1] ↑ Accurate prediction of EUV lithographic images and 3D mask effects using generative networks is an instance of scholarly article (scholarly article) [P31, primary]. Wikidata. wikidata.org.

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4ort.xyz Knowledge Graph. (2026). Accurate prediction of EUV lithographic images and 3D mask effects using generative networks. Retrieved May 24, 2026, from https://4ort.xyz/entity/accurate-prediction-of-euv-lithographic-images-and-3d-mask-effects-using-generative-networks

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“Accurate prediction of EUV lithographic images and 3D mask effects using generative networks.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/accurate-prediction-of-euv-lithographic-images-and-3d-mask-effects-using-generative-networks.

BibTeX

@misc{4ortxyz_accurate-prediction-of-euv-lithographic-images-and-3d-mask-effects-using-generative-networks_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Accurate prediction of EUV lithographic images and 3D mask effects using generative networks}}, year = {2026}, url = {https://4ort.xyz/entity/accurate-prediction-of-euv-lithographic-images-and-3d-mask-effects-using-generative-networks}, note = {Accessed: 2026-05-24}}

LLM prompt

According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Accurate prediction of EUV lithographic images and 3D mask effects using generative networks — https://4ort.xyz/entity/accurate-prediction-of-euv-lithographic-images-and-3d-mask-effects-using-generative-networks (retrieved 2026-05-24)

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