A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror

Research article (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015) · cited 10× · AI/ML
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A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror

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A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror. Retrieved May 24, 2026, from https://4ort.xyz/entity/a-silicon-based-fourier-transform-spectrometer-base-on-an-open-loop-controlled-electrothermal-mems-mirror
MLA “A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/a-silicon-based-fourier-transform-spectrometer-base-on-an-open-loop-controlled-electrothermal-mems-mirror.
BibTeX @misc{4ortxyz_a-silicon-based-fourier-transform-spectrometer-base-on-an-open-loop-controlled-electrothermal-mems-mirror_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror}}, year = {2026}, url = {https://4ort.xyz/entity/a-silicon-based-fourier-transform-spectrometer-base-on-an-open-loop-controlled-electrothermal-mems-mirror}, note = {Accessed: 2026-05-24}}
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