Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy. Retrieved May 24, 2026, from https://4ort.xyz/entity/a-monolithic-mems-position-sensor-for-closed-loop-high-speed-atomic-force-microscopy
MLA“A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/a-monolithic-mems-position-sensor-for-closed-loop-high-speed-atomic-force-microscopy.
BibTeX@misc{4ortxyz_a-monolithic-mems-position-sensor-for-closed-loop-high-speed-atomic-force-microscopy_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy}}, year = {2026}, url = {https://4ort.xyz/entity/a-monolithic-mems-position-sensor-for-closed-loop-high-speed-atomic-force-microscopy}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy — https://4ort.xyz/entity/a-monolithic-mems-position-sensor-for-closed-loop-high-speed-atomic-force-microscopy (retrieved 2026-05-24)
