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A micro-machined differential resonance accelerometer based on silicon on quartz method

Research article (Sensors and Actuators A Physical, 2016) · cited 18× · AI/ML
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A micro-machined differential resonance accelerometer based on silicon on quartz method

Summary

A micro-machined differential resonance accelerometer based on silicon on quartz method is a scholarly article[1].

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  • A micro-machined differential resonance accelerometer based on silicon on quartz method's instance of is recorded as scholarly article[2].

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

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  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). A micro-machined differential resonance accelerometer based on silicon on quartz method. Retrieved May 24, 2026, from https://4ort.xyz/entity/a-micro-machined-differential-resonance-accelerometer-based-on-silicon-on-quartz-method
MLA “A micro-machined differential resonance accelerometer based on silicon on quartz method.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/a-micro-machined-differential-resonance-accelerometer-based-on-silicon-on-quartz-method.
BibTeX @misc{4ortxyz_a-micro-machined-differential-resonance-accelerometer-based-on-silicon-on-quartz-method_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{A micro-machined differential resonance accelerometer based on silicon on quartz method}}, year = {2026}, url = {https://4ort.xyz/entity/a-micro-machined-differential-resonance-accelerometer-based-on-silicon-on-quartz-method}, note = {Accessed: 2026-05-24}}
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