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A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al<sub>1-X</sub> Sc<sub>x</sub>N
Research article (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019) · cited 10× · AI/ML
A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al1-X ScxN
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A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al1-X ScxN is a scholarly article[1].
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A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al1-X ScxN's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al<sub>1-X</sub> Sc<sub>x</sub>N. Retrieved May 24, 2026, from https://4ort.xyz/entity/a-generic-cmos-compatible-piezoelectric-multilayer-actuator-approach-based-on-permanent-ferroelectric-polarization-inver
MLA“A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al<sub>1-X</sub> Sc<sub>x</sub>N.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/a-generic-cmos-compatible-piezoelectric-multilayer-actuator-approach-based-on-permanent-ferroelectric-polarization-inver.
BibTeX@misc{4ortxyz_a-generic-cmos-compatible-piezoelectric-multilayer-actuator-approach-based-on-permanent-ferroelectric-polarization-inver_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al<sub>1-X</sub> Sc<sub>x</sub>N}}, year = {2026}, url = {https://4ort.xyz/entity/a-generic-cmos-compatible-piezoelectric-multilayer-actuator-approach-based-on-permanent-ferroelectric-polarization-inver}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al<sub>1-X</sub> Sc<sub>x</sub>N — https://4ort.xyz/entity/a-generic-cmos-compatible-piezoelectric-multilayer-actuator-approach-based-on-permanent-ferroelectric-polarization-inver (retrieved 2026-05-24)
