Home › Entities › academia › A CNN-Based CMP Planarization Model Considering LDE Effect

A CNN-Based CMP Planarization Model Considering LDE Effect

Research article (IEEE Transactions on Components Packaging and Manufacturing Technology, 2020) · cited 20× · AI/ML
academia openalex:W3010776687
Press Enter · cited answer in seconds

A CNN-Based CMP Planarization Model Considering LDE Effect

Summary

A CNN-Based CMP Planarization Model Considering LDE Effect is a scholarly article[1].

Key Facts

  • A CNN-Based CMP Planarization Model Considering LDE Effect's instance of is recorded as scholarly article[2].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). A CNN-Based CMP Planarization Model Considering LDE Effect. Retrieved May 24, 2026, from https://4ort.xyz/entity/a-cnn-based-cmp-planarization-model-considering-lde-effect
MLA “A CNN-Based CMP Planarization Model Considering LDE Effect.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/a-cnn-based-cmp-planarization-model-considering-lde-effect.
BibTeX @misc{4ortxyz_a-cnn-based-cmp-planarization-model-considering-lde-effect_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{A CNN-Based CMP Planarization Model Considering LDE Effect}}, year = {2026}, url = {https://4ort.xyz/entity/a-cnn-based-cmp-planarization-model-considering-lde-effect}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): A CNN-Based CMP Planarization Model Considering LDE Effect — https://4ort.xyz/entity/a-cnn-based-cmp-planarization-model-considering-lde-effect (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/a-cnn-based-cmp-planarization-model-considering-lde-effect · Last refreshed: