28 nm lithography process

Summary

Key Facts

• 28 nm lithography process followed 32 nm lithography process^[1].
• 28 nm lithography process was followed by 22 nm lithography process^[2].
• 28 nm lithography process's manufacturer is recorded as TSMC^[3].
• 28 nm lithography process's manufacturer is recorded as GlobalFoundries^[4].
• 28 nm lithography process is a type of photolithography^[5].

Body

Definition and Type

28 nm lithography process is a type of photolithography^[5].