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130 nm lithography process

semiconductor manufacturing processes with a 130 nm MOSFET technology node
Class type of: photolithography Q775523

Facts

5 properties
Follows
150 nm lithography process[1]
Followed by
110 nm lithography process[2]
Subclass of
photolithography[5]
Described by source
International Technology Roadmap for Semiconductors[6]
Manufacturer
TSMC, GlobalFoundries[3][4]
🏷️ Also known as
en 130 nm lithography process en 130 nm en 130nm en 0.13-micrometre en 0.13-micron en 0.13 μm en 0.13μm cs 130 nm cs 130 nanometrů es 130 nanómetros fr 130 nanomètres ko 130 nm 공정 pt 130 nanometros ru 130 нанометров ru 130 нм uk 130 нанометрів zh 130纳米制程 zh-hant 130奈米製程
🔖 Identifiers · 1
Freebase ID
/m/026wfg4

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🔗 Connections
← Fabrication method 10
Pentium III, Elbrus 2000, MCST-R500S, Banias, Northwood, Tualatin, Altera Cyclone, AMD Athlon 64 3800+ +2 more
Manufacturer 2
TSMC, GlobalFoundries
Described by source 1
International Technology Roadmap for Semiconductors
Subclass of 1
photolithography
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Related Entities

Altera Cyclone AMD Athlon 64 3800+ Banias Elbrus 2000 MCST-R500 MCST-R500S Northwood Pentium III TSMC Tualatin ULTRAY2000

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [1] ↑ . wikidata.org.
  2. [2] ↑ . wikidata.org.
  3. [3] ↑ . tsmc.com. Retrieved . tsmc.com. Provenance: wikidata.org.
  4. [4] ↑ . marcomauto.globalfoundries.com. Retrieved . marcomauto.globalfoundries.com. Provenance: wikidata.org.
  5. [5] ↑ . wikidata.org.
  6. [6] ↑ . wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). 130 nm lithography process. Retrieved November 1, 2026, from https://4ort.xyz/entity/130-nm-lithography-process
MLA “130 nm lithography process.” 4ort.xyz Knowledge Graph, 4ort.xyz, 1 Nov. 2026, https://4ort.xyz/entity/130-nm-lithography-process.
BibTeX @misc{4ortxyz_130-nm-lithography-process_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{130 nm lithography process}}, year = {2026}, url = {https://4ort.xyz/entity/130-nm-lithography-process}, note = {Accessed: 2026-11-01}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): 130 nm lithography process — https://4ort.xyz/entity/130-nm-lithography-process (retrieved 2026-11-01)

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