Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography

Research article (Microelectronic Engineering, 2016) · cited 13× · AI/ML
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Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography

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Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography is a scholarly article[1].

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  • Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/towards-a-novel-positive-tone-resist-mr-posebr-for-high-resolution-electron-beam-lithography
MLA “Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/towards-a-novel-positive-tone-resist-mr-posebr-for-high-resolution-electron-beam-lithography.
BibTeX @misc{4ortxyz_towards-a-novel-positive-tone-resist-mr-posebr-for-high-resolution-electron-beam-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography}}, year = {2026}, url = {https://4ort.xyz/entity/towards-a-novel-positive-tone-resist-mr-posebr-for-high-resolution-electron-beam-lithography}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography — https://4ort.xyz/entity/towards-a-novel-positive-tone-resist-mr-posebr-for-high-resolution-electron-beam-lithography (retrieved 2026-05-24)

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