Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). The future of EUV lithography: enabling Moore's Law in the next decade. Retrieved May 24, 2026, from https://4ort.xyz/entity/the-future-of-euv-lithography-enabling-moore-s-law-in-the-next-decade
MLA“The future of EUV lithography: enabling Moore's Law in the next decade.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/the-future-of-euv-lithography-enabling-moore-s-law-in-the-next-decade.
BibTeX@misc{4ortxyz_the-future-of-euv-lithography-enabling-moore-s-law-in-the-next-decade_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{The future of EUV lithography: enabling Moore's Law in the next decade}}, year = {2026}, url = {https://4ort.xyz/entity/the-future-of-euv-lithography-enabling-moore-s-law-in-the-next-decade}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): The future of EUV lithography: enabling Moore's Law in the next decade — https://4ort.xyz/entity/the-future-of-euv-lithography-enabling-moore-s-law-in-the-next-decade (retrieved 2026-05-24)
