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Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography
Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography
Summary
Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography is a scholarly article[1].
Key Facts
Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography's instance of is recorded as scholarly article[2].
References
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Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/sub-70-nm-resolution-patterning-of-high-etch-resistant-epoxy-novolac-resins-using-gas-permeable-templates-in-ultraviolet
MLA“Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/sub-70-nm-resolution-patterning-of-high-etch-resistant-epoxy-novolac-resins-using-gas-permeable-templates-in-ultraviolet.
BibTeX@misc{4ortxyz_sub-70-nm-resolution-patterning-of-high-etch-resistant-epoxy-novolac-resins-using-gas-permeable-templates-in-ultraviolet_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography}}, year = {2026}, url = {https://4ort.xyz/entity/sub-70-nm-resolution-patterning-of-high-etch-resistant-epoxy-novolac-resins-using-gas-permeable-templates-in-ultraviolet}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography — https://4ort.xyz/entity/sub-70-nm-resolution-patterning-of-high-etch-resistant-epoxy-novolac-resins-using-gas-permeable-templates-in-ultraviolet (retrieved 2026-05-24)
