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Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams
Research article (Journal of Analytical Atomic Spectrometry, 2016) · cited 22× · AI/ML
Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams
Summary
Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams is a scholarly article[1].
Key Facts
Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams's instance of is recorded as scholarly article[2].
References
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APA4ort.xyz Knowledge Graph. (2026). Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams. Retrieved May 24, 2026, from https://4ort.xyz/entity/study-of-ion-beam-induced-chemical-effects-in-silicon-with-a-downsized-high-resolution-x-ray-spectrometer-for-use-with-f
MLA“Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/study-of-ion-beam-induced-chemical-effects-in-silicon-with-a-downsized-high-resolution-x-ray-spectrometer-for-use-with-f.
BibTeX@misc{4ortxyz_study-of-ion-beam-induced-chemical-effects-in-silicon-with-a-downsized-high-resolution-x-ray-spectrometer-for-use-with-f_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams}}, year = {2026}, url = {https://4ort.xyz/entity/study-of-ion-beam-induced-chemical-effects-in-silicon-with-a-downsized-high-resolution-x-ray-spectrometer-for-use-with-f}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams — https://4ort.xyz/entity/study-of-ion-beam-induced-chemical-effects-in-silicon-with-a-downsized-high-resolution-x-ray-spectrometer-for-use-with-f (retrieved 2026-05-24)
