Simulating massively parallel electron beam inspection for sub-20 nm defects

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 13× · AI/ML

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Simulating massively parallel electron beam inspection for sub-20 nm defects

Summary

Simulating massively parallel electron beam inspection for sub-20 nm defects is a scholarly article^[1].

Key Facts

Simulating massively parallel electron beam inspection for sub-20 nm defects's instance of is recorded as scholarly article^[2].

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Authored by 4

Benjamin Bunday, B. L. Thiel, Kathy Quoi, Maseeh Mukhtar

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Benjamin Bunday, B. L. Thiel, Kathy Quoi, Maseeh Mukhtar

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Direct Wikidata claims

[2] ↑ Simulating massively parallel electron beam inspection for sub-20 nm defects — instance of (P31): scholarly article. wikidata.org.

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[1] ↑ Simulating massively parallel electron beam inspection for sub-20 nm defects is an instance of scholarly article (scholarly article) [P31, primary]. Wikidata. wikidata.org.

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4ort.xyz Knowledge Graph. (2026). Simulating massively parallel electron beam inspection for sub-20 nm defects. Retrieved May 24, 2026, from https://4ort.xyz/entity/simulating-massively-parallel-electron-beam-inspection-for-sub-20-nm-defects

MLA

“Simulating massively parallel electron beam inspection for sub-20 nm defects.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/simulating-massively-parallel-electron-beam-inspection-for-sub-20-nm-defects.

BibTeX

@misc{4ortxyz_simulating-massively-parallel-electron-beam-inspection-for-sub-20-nm-defects_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Simulating massively parallel electron beam inspection for sub-20 nm defects}}, year = {2026}, url = {https://4ort.xyz/entity/simulating-massively-parallel-electron-beam-inspection-for-sub-20-nm-defects}, note = {Accessed: 2026-05-24}}

LLM prompt

According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Simulating massively parallel electron beam inspection for sub-20 nm defects — https://4ort.xyz/entity/simulating-massively-parallel-electron-beam-inspection-for-sub-20-nm-defects (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/simulating-massively-parallel-electron-beam-inspection-for-sub-20-nm-defects · Last refreshed: May 24, 2026