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Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence
Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2017) · cited 23× · AI/ML
Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence
Summary
Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence is a scholarly article[1].
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Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence. Retrieved May 24, 2026, from https://4ort.xyz/entity/proximity-effect-correction-in-electron-beam-lithography-based-on-computation-of-critical-development-time-with-swarm-in
MLA“Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/proximity-effect-correction-in-electron-beam-lithography-based-on-computation-of-critical-development-time-with-swarm-in.
BibTeX@misc{4ortxyz_proximity-effect-correction-in-electron-beam-lithography-based-on-computation-of-critical-development-time-with-swarm-in_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence}}, year = {2026}, url = {https://4ort.xyz/entity/proximity-effect-correction-in-electron-beam-lithography-based-on-computation-of-critical-development-time-with-swarm-in}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence — https://4ort.xyz/entity/proximity-effect-correction-in-electron-beam-lithography-based-on-computation-of-critical-development-time-with-swarm-in (retrieved 2026-05-24)
