Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication

Research article (2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2015) · cited 11× · AI/ML
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Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication

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Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication. Retrieved May 24, 2026, from https://4ort.xyz/entity/predictive-data-analytics-and-machine-learning-enabling-metrology-and-process-control-for-advanced-node-ic-fabrication
MLA “Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/predictive-data-analytics-and-machine-learning-enabling-metrology-and-process-control-for-advanced-node-ic-fabrication.
BibTeX @misc{4ortxyz_predictive-data-analytics-and-machine-learning-enabling-metrology-and-process-control-for-advanced-node-ic-fabrication_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication}}, year = {2026}, url = {https://4ort.xyz/entity/predictive-data-analytics-and-machine-learning-enabling-metrology-and-process-control-for-advanced-node-ic-fabrication}, note = {Accessed: 2026-05-24}}
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