Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks

Research article (Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science, 2018) · cited 20× · AI/ML
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Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks

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Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks is a scholarly article[1].

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  • Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks. Retrieved May 24, 2026, from https://4ort.xyz/entity/prediction-of-residual-clamping-force-for-coulomb-type-and-johnsenrahbek-type-of-bipolar-electrostatic-chucks
MLA “Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/prediction-of-residual-clamping-force-for-coulomb-type-and-johnsenrahbek-type-of-bipolar-electrostatic-chucks.
BibTeX @misc{4ortxyz_prediction-of-residual-clamping-force-for-coulomb-type-and-johnsenrahbek-type-of-bipolar-electrostatic-chucks_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks}}, year = {2026}, url = {https://4ort.xyz/entity/prediction-of-residual-clamping-force-for-coulomb-type-and-johnsenrahbek-type-of-bipolar-electrostatic-chucks}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks — https://4ort.xyz/entity/prediction-of-residual-clamping-force-for-coulomb-type-and-johnsenrahbek-type-of-bipolar-electrostatic-chucks (retrieved 2026-05-24)

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