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On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments
Research article (Journal of Applied Physics, 2015) · cited 59× · AI/ML
On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments
Summary
On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments is a scholarly article[1].
Key Facts
On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments. Retrieved May 24, 2026, from https://4ort.xyz/entity/on-the-pressure-effect-in-energetic-deposition-of-cu-thin-films-by-modulated-pulsed-power-magnetron-sputtering-a-global-
MLA“On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/on-the-pressure-effect-in-energetic-deposition-of-cu-thin-films-by-modulated-pulsed-power-magnetron-sputtering-a-global-.
BibTeX@misc{4ortxyz_on-the-pressure-effect-in-energetic-deposition-of-cu-thin-films-by-modulated-pulsed-power-magnetron-sputtering-a-global-_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments}}, year = {2026}, url = {https://4ort.xyz/entity/on-the-pressure-effect-in-energetic-deposition-of-cu-thin-films-by-modulated-pulsed-power-magnetron-sputtering-a-global-}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments — https://4ort.xyz/entity/on-the-pressure-effect-in-energetic-deposition-of-cu-thin-films-by-modulated-pulsed-power-magnetron-sputtering-a-global- (retrieved 2026-05-24)
