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Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses
Research article (Nanoscale Advances, 2023) · cited 28× · AI/ML
Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses
Summary
Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses is a scholarly article[1].
Key Facts
Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses's instance of is recorded as scholarly article[2].
References
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Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses. Retrieved May 24, 2026, from https://4ort.xyz/entity/novel-hexameric-tin-carboxylate-clusters-as-efficient-negative-tone-euv-photoresists-high-resolution-with-well-defined-p
MLA“Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/novel-hexameric-tin-carboxylate-clusters-as-efficient-negative-tone-euv-photoresists-high-resolution-with-well-defined-p.
BibTeX@misc{4ortxyz_novel-hexameric-tin-carboxylate-clusters-as-efficient-negative-tone-euv-photoresists-high-resolution-with-well-defined-p_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses}}, year = {2026}, url = {https://4ort.xyz/entity/novel-hexameric-tin-carboxylate-clusters-as-efficient-negative-tone-euv-photoresists-high-resolution-with-well-defined-p}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses — https://4ort.xyz/entity/novel-hexameric-tin-carboxylate-clusters-as-efficient-negative-tone-euv-photoresists-high-resolution-with-well-defined-p (retrieved 2026-05-24)
