Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 14× · AI/ML
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Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance

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Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance is a scholarly article[1].

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  • Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance. Retrieved May 24, 2026, from https://4ort.xyz/entity/novel-fluidic-packaging-of-gimbal-less-mems-mirrors-for-increased-optical-resolution-and-overall-performance
MLA “Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/novel-fluidic-packaging-of-gimbal-less-mems-mirrors-for-increased-optical-resolution-and-overall-performance.
BibTeX @misc{4ortxyz_novel-fluidic-packaging-of-gimbal-less-mems-mirrors-for-increased-optical-resolution-and-overall-performance_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance}}, year = {2026}, url = {https://4ort.xyz/entity/novel-fluidic-packaging-of-gimbal-less-mems-mirrors-for-increased-optical-resolution-and-overall-performance}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance — https://4ort.xyz/entity/novel-fluidic-packaging-of-gimbal-less-mems-mirrors-for-increased-optical-resolution-and-overall-performance (retrieved 2026-05-24)

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