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Novel EUV resist development for sub-14nm half pitch

Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 25× · AI/ML
academia openalex:W2014532759
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Novel EUV resist development for sub-14nm half pitch

Summary

Novel EUV resist development for sub-14nm half pitch is a scholarly article[1].

Key Facts

  • Novel EUV resist development for sub-14nm half pitch's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). Novel EUV resist development for sub-14nm half pitch. Retrieved May 24, 2026, from https://4ort.xyz/entity/novel-euv-resist-development-for-sub-14nm-half-pitch
MLA “Novel EUV resist development for sub-14nm half pitch.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/novel-euv-resist-development-for-sub-14nm-half-pitch.
BibTeX @misc{4ortxyz_novel-euv-resist-development-for-sub-14nm-half-pitch_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Novel EUV resist development for sub-14nm half pitch}}, year = {2026}, url = {https://4ort.xyz/entity/novel-euv-resist-development-for-sub-14nm-half-pitch}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Novel EUV resist development for sub-14nm half pitch — https://4ort.xyz/entity/novel-euv-resist-development-for-sub-14nm-half-pitch (retrieved 2026-05-24)

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