Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition

Research article (Surface and Coatings Technology, 2019) · cited 29× · AI/ML
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Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition

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Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition is a scholarly article[1].

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  • Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition. Retrieved May 24, 2026, from https://4ort.xyz/entity/microstructure-and-young-s-modulus-of-zrn-thin-film-prepared-by-dual-ion-beam-sputtering-deposition
MLA “Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/microstructure-and-young-s-modulus-of-zrn-thin-film-prepared-by-dual-ion-beam-sputtering-deposition.
BibTeX @misc{4ortxyz_microstructure-and-young-s-modulus-of-zrn-thin-film-prepared-by-dual-ion-beam-sputtering-deposition_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition}}, year = {2026}, url = {https://4ort.xyz/entity/microstructure-and-young-s-modulus-of-zrn-thin-film-prepared-by-dual-ion-beam-sputtering-deposition}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition — https://4ort.xyz/entity/microstructure-and-young-s-modulus-of-zrn-thin-film-prepared-by-dual-ion-beam-sputtering-deposition (retrieved 2026-05-24)

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