Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Maskless lithography based on oblique scanning of point array with digital distortion correction. Retrieved May 24, 2026, from https://4ort.xyz/entity/maskless-lithography-based-on-oblique-scanning-of-point-array-with-digital-distortion-correction
MLA“Maskless lithography based on oblique scanning of point array with digital distortion correction.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/maskless-lithography-based-on-oblique-scanning-of-point-array-with-digital-distortion-correction.
BibTeX@misc{4ortxyz_maskless-lithography-based-on-oblique-scanning-of-point-array-with-digital-distortion-correction_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Maskless lithography based on oblique scanning of point array with digital distortion correction}}, year = {2026}, url = {https://4ort.xyz/entity/maskless-lithography-based-on-oblique-scanning-of-point-array-with-digital-distortion-correction}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Maskless lithography based on oblique scanning of point array with digital distortion correction — https://4ort.xyz/entity/maskless-lithography-based-on-oblique-scanning-of-point-array-with-digital-distortion-correction (retrieved 2026-05-24)
