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Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment

Research article (IEEE Transactions on Semiconductor Manufacturing, 2022) · cited 42× · AI/ML
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Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment

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Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment. Retrieved May 24, 2026, from https://4ort.xyz/entity/machine-learning-based-process-level-fault-detection-and-part-level-fault-classification-in-semiconductor-etch-equipment
MLA “Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/machine-learning-based-process-level-fault-detection-and-part-level-fault-classification-in-semiconductor-etch-equipment.
BibTeX @misc{4ortxyz_machine-learning-based-process-level-fault-detection-and-part-level-fault-classification-in-semiconductor-etch-equipment_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment}}, year = {2026}, url = {https://4ort.xyz/entity/machine-learning-based-process-level-fault-detection-and-part-level-fault-classification-in-semiconductor-etch-equipment}, note = {Accessed: 2026-05-24}}
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