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Machine learning approach to thickness prediction from<i>in situ</i>spectroscopic ellipsometry data for atomic layer deposition processes
Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2021) · cited 18× · AI/ML
Machine learning approach to thickness prediction fromin situspectroscopic ellipsometry data for atomic layer deposition processes
Summary
Machine learning approach to thickness prediction fromin situspectroscopic ellipsometry data for atomic layer deposition processes is a scholarly article[1].
Key Facts
Machine learning approach to thickness prediction fromin situspectroscopic ellipsometry data for atomic layer deposition processes's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Machine learning approach to thickness prediction from<i>in situ</i>spectroscopic ellipsometry data for atomic layer deposition processes. Retrieved May 24, 2026, from https://4ort.xyz/entity/machine-learning-approach-to-thickness-prediction-from-i-in-situ-i-spectroscopic-ellipsometry-data-for-atomic-layer-depo
MLA“Machine learning approach to thickness prediction from<i>in situ</i>spectroscopic ellipsometry data for atomic layer deposition processes.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/machine-learning-approach-to-thickness-prediction-from-i-in-situ-i-spectroscopic-ellipsometry-data-for-atomic-layer-depo.
BibTeX@misc{4ortxyz_machine-learning-approach-to-thickness-prediction-from-i-in-situ-i-spectroscopic-ellipsometry-data-for-atomic-layer-depo_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Machine learning approach to thickness prediction from<i>in situ</i>spectroscopic ellipsometry data for atomic layer deposition processes}}, year = {2026}, url = {https://4ort.xyz/entity/machine-learning-approach-to-thickness-prediction-from-i-in-situ-i-spectroscopic-ellipsometry-data-for-atomic-layer-depo}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Machine learning approach to thickness prediction from<i>in situ</i>spectroscopic ellipsometry data for atomic layer deposition processes — https://4ort.xyz/entity/machine-learning-approach-to-thickness-prediction-from-i-in-situ-i-spectroscopic-ellipsometry-data-for-atomic-layer-depo (retrieved 2026-05-24)
