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Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process

Research article (2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015) · cited 13× · AI/ML
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Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process

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Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process is a scholarly article[1].

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  • Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process's instance of is recorded as scholarly article[2].

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

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  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process. Retrieved May 24, 2026, from https://4ort.xyz/entity/low-noise-aln-on-si-resonant-infrared-detectors-using-a-commercial-foundry-mems-fabrication-process
MLA “Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/low-noise-aln-on-si-resonant-infrared-detectors-using-a-commercial-foundry-mems-fabrication-process.
BibTeX @misc{4ortxyz_low-noise-aln-on-si-resonant-infrared-detectors-using-a-commercial-foundry-mems-fabrication-process_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process}}, year = {2026}, url = {https://4ort.xyz/entity/low-noise-aln-on-si-resonant-infrared-detectors-using-a-commercial-foundry-mems-fabrication-process}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process — https://4ort.xyz/entity/low-noise-aln-on-si-resonant-infrared-detectors-using-a-commercial-foundry-mems-fabrication-process (retrieved 2026-05-24)

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