Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection

Research article (IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2023) · cited 11× · AI/ML
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Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection

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Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection. Retrieved May 24, 2026, from https://4ort.xyz/entity/lithography-hotspot-detection-based-on-heterogeneous-federated-learning-with-local-adaptation-and-feature-selection
MLA “Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/lithography-hotspot-detection-based-on-heterogeneous-federated-learning-with-local-adaptation-and-feature-selection.
BibTeX @misc{4ortxyz_lithography-hotspot-detection-based-on-heterogeneous-federated-learning-with-local-adaptation-and-feature-selection_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection}}, year = {2026}, url = {https://4ort.xyz/entity/lithography-hotspot-detection-based-on-heterogeneous-federated-learning-with-local-adaptation-and-feature-selection}, note = {Accessed: 2026-05-24}}
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