Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control

Research article (IEEE Transactions on Control Systems Technology, 2018) · cited 12× · AI/ML
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Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control

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Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control. Retrieved May 24, 2026, from https://4ort.xyz/entity/iterative-identification-and-control-using-non-normalized-coprime-factors-with-application-in-wafer-stage-motion-control
MLA “Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/iterative-identification-and-control-using-non-normalized-coprime-factors-with-application-in-wafer-stage-motion-control.
BibTeX @misc{4ortxyz_iterative-identification-and-control-using-non-normalized-coprime-factors-with-application-in-wafer-stage-motion-control_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control}}, year = {2026}, url = {https://4ort.xyz/entity/iterative-identification-and-control-using-non-normalized-coprime-factors-with-application-in-wafer-stage-motion-control}, note = {Accessed: 2026-05-24}}
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