Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners

Research article (IEEE Transactions on Control Systems Technology, 2016) · cited 33× · AI/ML

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Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners

Summary

Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners is a scholarly article^[1].

Key Facts

Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners's instance of is recorded as scholarly article^[2].

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Instance of scholarly article

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Authored by 4

Ali Bazaei, Anthony G. Fowler, Mohammad Maroufi, S. O. Reza Moheimani

← Author of 4

Ali Bazaei, Anthony G. Fowler, Mohammad Maroufi, S. O. Reza Moheimani

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Direct Wikidata claims

[2] ↑ Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners — instance of (P31): scholarly article. wikidata.org.

Class ancestry

[1] ↑ Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners is an instance of scholarly article (scholarly article) [P31, primary]. Wikidata. wikidata.org.

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APA

4ort.xyz Knowledge Graph. (2026). Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners. Retrieved May 24, 2026, from https://4ort.xyz/entity/internal-model-control-for-spiral-trajectory-tracking-with-mems-afm-scanners

MLA

“Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/internal-model-control-for-spiral-trajectory-tracking-with-mems-afm-scanners.

BibTeX

@misc{4ortxyz_internal-model-control-for-spiral-trajectory-tracking-with-mems-afm-scanners_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners}}, year = {2026}, url = {https://4ort.xyz/entity/internal-model-control-for-spiral-trajectory-tracking-with-mems-afm-scanners}, note = {Accessed: 2026-05-24}}

LLM prompt

According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners — https://4ort.xyz/entity/internal-model-control-for-spiral-trajectory-tracking-with-mems-afm-scanners (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/internal-model-control-for-spiral-trajectory-tracking-with-mems-afm-scanners · Last refreshed: May 24, 2026