Integrated system and control design of a one DoF nano-metrology platform

Research article (Mechatronics, 2017) · cited 28× · AI/ML
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Integrated system and control design of a one DoF nano-metrology platform

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Integrated system and control design of a one DoF nano-metrology platform is a scholarly article[1].

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  • Integrated system and control design of a one DoF nano-metrology platform's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Integrated system and control design of a one DoF nano-metrology platform. Retrieved May 24, 2026, from https://4ort.xyz/entity/integrated-system-and-control-design-of-a-one-dof-nano-metrology-platform
MLA “Integrated system and control design of a one DoF nano-metrology platform.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/integrated-system-and-control-design-of-a-one-dof-nano-metrology-platform.
BibTeX @misc{4ortxyz_integrated-system-and-control-design-of-a-one-dof-nano-metrology-platform_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Integrated system and control design of a one DoF nano-metrology platform}}, year = {2026}, url = {https://4ort.xyz/entity/integrated-system-and-control-design-of-a-one-dof-nano-metrology-platform}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Integrated system and control design of a one DoF nano-metrology platform — https://4ort.xyz/entity/integrated-system-and-control-design-of-a-one-dof-nano-metrology-platform (retrieved 2026-05-24)

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