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Improving detection of plasma etching end point using light compensation on optical emission spectra
Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2022) · cited 13× · AI/ML
Improving detection of plasma etching end point using light compensation on optical emission spectra
Summary
Improving detection of plasma etching end point using light compensation on optical emission spectra is a scholarly article[1].
Key Facts
Improving detection of plasma etching end point using light compensation on optical emission spectra's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Improving detection of plasma etching end point using light compensation on optical emission spectra. Retrieved May 24, 2026, from https://4ort.xyz/entity/improving-detection-of-plasma-etching-end-point-using-light-compensation-on-optical-emission-spectra
MLA“Improving detection of plasma etching end point using light compensation on optical emission spectra.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/improving-detection-of-plasma-etching-end-point-using-light-compensation-on-optical-emission-spectra.
BibTeX@misc{4ortxyz_improving-detection-of-plasma-etching-end-point-using-light-compensation-on-optical-emission-spectra_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Improving detection of plasma etching end point using light compensation on optical emission spectra}}, year = {2026}, url = {https://4ort.xyz/entity/improving-detection-of-plasma-etching-end-point-using-light-compensation-on-optical-emission-spectra}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Improving detection of plasma etching end point using light compensation on optical emission spectra — https://4ort.xyz/entity/improving-detection-of-plasma-etching-end-point-using-light-compensation-on-optical-emission-spectra (retrieved 2026-05-24)
