ILT optimization of EUV masks for sub-7nm lithography
Research article (33rd European Mask and Lithography Conference, 2017) · cited 18× · AI/ML
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Direct Wikidata claims
- [2] ↑ ILT optimization of EUV masks for sub-7nm lithography — instance of (P31): scholarly article. wikidata.org.
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4ort.xyz Knowledge Graph. (2026). ILT optimization of EUV masks for sub-7nm lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/ilt-optimization-of-euv-masks-for-sub-7nm-lithography
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“ILT optimization of EUV masks for sub-7nm lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/ilt-optimization-of-euv-masks-for-sub-7nm-lithography.
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@misc{4ortxyz_ilt-optimization-of-euv-masks-for-sub-7nm-lithography_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{ILT optimization of EUV masks for sub-7nm lithography}}, year = {2026}, url = {https://4ort.xyz/entity/ilt-optimization-of-euv-masks-for-sub-7nm-lithography}, note = {Accessed: 2026-05-24}}
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