Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching

Research article (Journal of Microelectromechanical Systems, 2023) · cited 13× · AI/ML
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Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching

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Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching. Retrieved May 24, 2026, from https://4ort.xyz/entity/hybrid-mems-actuator-with-3-degrees-of-freedom-for-efficient-planar-optical-switching
MLA “Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/hybrid-mems-actuator-with-3-degrees-of-freedom-for-efficient-planar-optical-switching.
BibTeX @misc{4ortxyz_hybrid-mems-actuator-with-3-degrees-of-freedom-for-efficient-planar-optical-switching_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching}}, year = {2026}, url = {https://4ort.xyz/entity/hybrid-mems-actuator-with-3-degrees-of-freedom-for-efficient-planar-optical-switching}, note = {Accessed: 2026-05-24}}
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