Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses

Research article (Nanoscale Advances, 2023) · cited 15× · AI/ML
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Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses

Summary

Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses is a scholarly article[1].

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  • Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses. Retrieved May 24, 2026, from https://4ort.xyz/entity/highly-hydroxylated-hafnium-clusters-are-accessible-to-high-resolution-euv-photoresists-under-small-energy-doses
MLA “Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/highly-hydroxylated-hafnium-clusters-are-accessible-to-high-resolution-euv-photoresists-under-small-energy-doses.
BibTeX @misc{4ortxyz_highly-hydroxylated-hafnium-clusters-are-accessible-to-high-resolution-euv-photoresists-under-small-energy-doses_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses}}, year = {2026}, url = {https://4ort.xyz/entity/highly-hydroxylated-hafnium-clusters-are-accessible-to-high-resolution-euv-photoresists-under-small-energy-doses}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses — https://4ort.xyz/entity/highly-hydroxylated-hafnium-clusters-are-accessible-to-high-resolution-euv-photoresists-under-small-energy-doses (retrieved 2026-05-24)

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