Home › Entities › academia › High resolution spin-on electron beam lithography resist with exceptional dry etching resistance

High resolution spin-on electron beam lithography resist with exceptional dry etching resistance

Research article (Applied Materials Today, 2015) · cited 10× · AI/ML
academia openalex:W2207183411
Press Enter · cited answer in seconds

High resolution spin-on electron beam lithography resist with exceptional dry etching resistance

Summary

High resolution spin-on electron beam lithography resist with exceptional dry etching resistance is a scholarly article[1].

Key Facts

  • High resolution spin-on electron beam lithography resist with exceptional dry etching resistance's instance of is recorded as scholarly article[2].

References

Programmatic citations — every numbered marker resolves to a verifiable graph row below.

Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

📑 Cite this page

Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.

APA 4ort.xyz Knowledge Graph. (2026). High resolution spin-on electron beam lithography resist with exceptional dry etching resistance. Retrieved May 24, 2026, from https://4ort.xyz/entity/high-resolution-spin-on-electron-beam-lithography-resist-with-exceptional-dry-etching-resistance
MLA “High resolution spin-on electron beam lithography resist with exceptional dry etching resistance.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/high-resolution-spin-on-electron-beam-lithography-resist-with-exceptional-dry-etching-resistance.
BibTeX @misc{4ortxyz_high-resolution-spin-on-electron-beam-lithography-resist-with-exceptional-dry-etching-resistance_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{High resolution spin-on electron beam lithography resist with exceptional dry etching resistance}}, year = {2026}, url = {https://4ort.xyz/entity/high-resolution-spin-on-electron-beam-lithography-resist-with-exceptional-dry-etching-resistance}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): High resolution spin-on electron beam lithography resist with exceptional dry etching resistance — https://4ort.xyz/entity/high-resolution-spin-on-electron-beam-lithography-resist-with-exceptional-dry-etching-resistance (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/high-resolution-spin-on-electron-beam-lithography-resist-with-exceptional-dry-etching-resistance · Last refreshed: