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High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators

Research article (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019) · cited 14× · AI/ML
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High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators

Summary

High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators is a scholarly article[1].

Key Facts

  • High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators. Retrieved May 24, 2026, from https://4ort.xyz/entity/high-resolution-piezoelectric-mems-scanner-fully-integrated-with-focus-tuning-and-driving-actuators
MLA “High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/high-resolution-piezoelectric-mems-scanner-fully-integrated-with-focus-tuning-and-driving-actuators.
BibTeX @misc{4ortxyz_high-resolution-piezoelectric-mems-scanner-fully-integrated-with-focus-tuning-and-driving-actuators_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators}}, year = {2026}, url = {https://4ort.xyz/entity/high-resolution-piezoelectric-mems-scanner-fully-integrated-with-focus-tuning-and-driving-actuators}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators — https://4ort.xyz/entity/high-resolution-piezoelectric-mems-scanner-fully-integrated-with-focus-tuning-and-driving-actuators (retrieved 2026-05-24)

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