High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes

Research article (2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019) · cited 26× · AI/ML
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High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes

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High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes. Retrieved May 24, 2026, from https://4ort.xyz/entity/high-q-3d-micro-shell-resonator-with-high-shock-immunity-and-low-frequency-mismatch-for-mems-gyroscopes
MLA “High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/high-q-3d-micro-shell-resonator-with-high-shock-immunity-and-low-frequency-mismatch-for-mems-gyroscopes.
BibTeX @misc{4ortxyz_high-q-3d-micro-shell-resonator-with-high-shock-immunity-and-low-frequency-mismatch-for-mems-gyroscopes_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes}}, year = {2026}, url = {https://4ort.xyz/entity/high-q-3d-micro-shell-resonator-with-high-shock-immunity-and-low-frequency-mismatch-for-mems-gyroscopes}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes — https://4ort.xyz/entity/high-q-3d-micro-shell-resonator-with-high-shock-immunity-and-low-frequency-mismatch-for-mems-gyroscopes (retrieved 2026-05-24)

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