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Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography
Research article (physica status solidi (RRL) - Rapid Research Letters, 2023) · cited 12× · AI/ML
Ge2Sb2Te5 Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography
Summary
Ge2Sb2Te5 Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography is a scholarly article[1].
Key Facts
Ge2Sb2Te5 Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography's instance of is recorded as scholarly article[2].
References
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Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/ge-sub-2-sub-sb-sub-2-sub-te-sub-5-sub-thin-film-as-a-promising-heatmode-resist-for-highresolution-direct-laser-writing-
MLA“Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/ge-sub-2-sub-sb-sub-2-sub-te-sub-5-sub-thin-film-as-a-promising-heatmode-resist-for-highresolution-direct-laser-writing-.
BibTeX@misc{4ortxyz_ge-sub-2-sub-sb-sub-2-sub-te-sub-5-sub-thin-film-as-a-promising-heatmode-resist-for-highresolution-direct-laser-writing-_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography}}, year = {2026}, url = {https://4ort.xyz/entity/ge-sub-2-sub-sb-sub-2-sub-te-sub-5-sub-thin-film-as-a-promising-heatmode-resist-for-highresolution-direct-laser-writing-}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography — https://4ort.xyz/entity/ge-sub-2-sub-sb-sub-2-sub-te-sub-5-sub-thin-film-as-a-promising-heatmode-resist-for-highresolution-direct-laser-writing- (retrieved 2026-05-24)
