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Formation of AlF<sub><i>x</i></sub> Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study
Research article (The Journal of Physical Chemistry C, 2019) · cited 10× · AI/ML
Formation of AlFx Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study
Summary
Formation of AlFx Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study is a scholarly article[1].
Key Facts
Formation of AlFx Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Formation of AlF<sub><i>x</i></sub> Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study. Retrieved May 24, 2026, from https://4ort.xyz/entity/formation-of-alf-sub-i-x-i-sub-gaseous-phases-during-high-temperature-etching-a-reactive-force-field-based-molecular-dyn
MLA“Formation of AlF<sub><i>x</i></sub> Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/formation-of-alf-sub-i-x-i-sub-gaseous-phases-during-high-temperature-etching-a-reactive-force-field-based-molecular-dyn.
BibTeX@misc{4ortxyz_formation-of-alf-sub-i-x-i-sub-gaseous-phases-during-high-temperature-etching-a-reactive-force-field-based-molecular-dyn_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Formation of AlF<sub><i>x</i></sub> Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study}}, year = {2026}, url = {https://4ort.xyz/entity/formation-of-alf-sub-i-x-i-sub-gaseous-phases-during-high-temperature-etching-a-reactive-force-field-based-molecular-dyn}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Formation of AlF<sub><i>x</i></sub> Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study — https://4ort.xyz/entity/formation-of-alf-sub-i-x-i-sub-gaseous-phases-during-high-temperature-etching-a-reactive-force-field-based-molecular-dyn (retrieved 2026-05-24)
