Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Fast diffraction model of an EUV mask based on asymmetric patch data fitting. Retrieved May 24, 2026, from https://4ort.xyz/entity/fast-diffraction-model-of-an-euv-mask-based-on-asymmetric-patch-data-fitting
MLA“Fast diffraction model of an EUV mask based on asymmetric patch data fitting.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/fast-diffraction-model-of-an-euv-mask-based-on-asymmetric-patch-data-fitting.
BibTeX@misc{4ortxyz_fast-diffraction-model-of-an-euv-mask-based-on-asymmetric-patch-data-fitting_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Fast diffraction model of an EUV mask based on asymmetric patch data fitting}}, year = {2026}, url = {https://4ort.xyz/entity/fast-diffraction-model-of-an-euv-mask-based-on-asymmetric-patch-data-fitting}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Fast diffraction model of an EUV mask based on asymmetric patch data fitting — https://4ort.xyz/entity/fast-diffraction-model-of-an-euv-mask-based-on-asymmetric-patch-data-fitting (retrieved 2026-05-24)
