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Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography
Research article (Microelectronics Journal, 2023) · cited 16× · AI/ML
Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography
Summary
Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography is a scholarly article[1].
Key Facts
Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography's instance of is recorded as scholarly article[2].
References
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APA4ort.xyz Knowledge Graph. (2026). Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography. Retrieved May 24, 2026, from https://4ort.xyz/entity/fast-and-accurate-proximity-effect-correction-algorithm-based-on-pattern-edge-shape-adjustment-for-electron-beam-lithogr
MLA“Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/fast-and-accurate-proximity-effect-correction-algorithm-based-on-pattern-edge-shape-adjustment-for-electron-beam-lithogr.
BibTeX@misc{4ortxyz_fast-and-accurate-proximity-effect-correction-algorithm-based-on-pattern-edge-shape-adjustment-for-electron-beam-lithogr_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography}}, year = {2026}, url = {https://4ort.xyz/entity/fast-and-accurate-proximity-effect-correction-algorithm-based-on-pattern-edge-shape-adjustment-for-electron-beam-lithogr}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography — https://4ort.xyz/entity/fast-and-accurate-proximity-effect-correction-algorithm-based-on-pattern-edge-shape-adjustment-for-electron-beam-lithogr (retrieved 2026-05-24)
