Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates
Summary
Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates is a scholarly article[1].
Key Facts
Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates's instance of is recorded as scholarly article[2].
References
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APA4ort.xyz Knowledge Graph. (2026). Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates. Retrieved May 24, 2026, from https://4ort.xyz/entity/electrical-and-structural-characteristics-of-sputtered-c-oriented-aln-thin-films-on-si-100-and-si-110-substrates
MLA“Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/electrical-and-structural-characteristics-of-sputtered-c-oriented-aln-thin-films-on-si-100-and-si-110-substrates.
BibTeX@misc{4ortxyz_electrical-and-structural-characteristics-of-sputtered-c-oriented-aln-thin-films-on-si-100-and-si-110-substrates_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates}}, year = {2026}, url = {https://4ort.xyz/entity/electrical-and-structural-characteristics-of-sputtered-c-oriented-aln-thin-films-on-si-100-and-si-110-substrates}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates — https://4ort.xyz/entity/electrical-and-structural-characteristics-of-sputtered-c-oriented-aln-thin-films-on-si-100-and-si-110-substrates (retrieved 2026-05-24)
