Effects of substrate temperature on the structure, residual stress and nanohardness of Ti6Al4V films prepared by magnetron sputtering

Research article (Applied Surface Science, 2016) · cited 42× · AI/ML
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Effects of substrate temperature on the structure, residual stress and nanohardness of Ti6Al4V films prepared by magnetron sputtering

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Effects of substrate temperature on the structure, residual stress and nanohardness of Ti6Al4V films prepared by magnetron sputtering is a scholarly article[1].

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  • Effects of substrate temperature on the structure, residual stress and nanohardness of Ti6Al4V films prepared by magnetron sputtering's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Effects of substrate temperature on the structure, residual stress and nanohardness of Ti6Al4V films prepared by magnetron sputtering. Retrieved May 24, 2026, from https://4ort.xyz/entity/effects-of-substrate-temperature-on-the-structure-residual-stress-and-nanohardness-of-ti6al4v-films-prepared-by-magnetro
MLA “Effects of substrate temperature on the structure, residual stress and nanohardness of Ti6Al4V films prepared by magnetron sputtering.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/effects-of-substrate-temperature-on-the-structure-residual-stress-and-nanohardness-of-ti6al4v-films-prepared-by-magnetro.
BibTeX @misc{4ortxyz_effects-of-substrate-temperature-on-the-structure-residual-stress-and-nanohardness-of-ti6al4v-films-prepared-by-magnetro_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Effects of substrate temperature on the structure, residual stress and nanohardness of Ti6Al4V films prepared by magnetron sputtering}}, year = {2026}, url = {https://4ort.xyz/entity/effects-of-substrate-temperature-on-the-structure-residual-stress-and-nanohardness-of-ti6al4v-films-prepared-by-magnetro}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Effects of substrate temperature on the structure, residual stress and nanohardness of Ti6Al4V films prepared by magnetron sputtering — https://4ort.xyz/entity/effects-of-substrate-temperature-on-the-structure-residual-stress-and-nanohardness-of-ti6al4v-films-prepared-by-magnetro (retrieved 2026-05-24)

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