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Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique

Research article (Optics Express, 2017) · cited 40× · AI/ML
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Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique

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Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique is a scholarly article[1].

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  • Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique's instance of is recorded as scholarly article[2].

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

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  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique. Retrieved May 24, 2026, from https://4ort.xyz/entity/edge-smoothness-enhancement-in-dmd-scanning-lithography-system-based-on-a-wobulation-technique
MLA “Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/edge-smoothness-enhancement-in-dmd-scanning-lithography-system-based-on-a-wobulation-technique.
BibTeX @misc{4ortxyz_edge-smoothness-enhancement-in-dmd-scanning-lithography-system-based-on-a-wobulation-technique_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique}}, year = {2026}, url = {https://4ort.xyz/entity/edge-smoothness-enhancement-in-dmd-scanning-lithography-system-based-on-a-wobulation-technique}, note = {Accessed: 2026-05-24}}
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