Deterministic measurement and correction of the pad shape in full-aperture polishing processes

Research article (Journal of the European Optical Society Rapid Publications, 2015) · cited 12× · AI/ML
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Deterministic measurement and correction of the pad shape in full-aperture polishing processes

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Deterministic measurement and correction of the pad shape in full-aperture polishing processes is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Deterministic measurement and correction of the pad shape in full-aperture polishing processes. Retrieved May 24, 2026, from https://4ort.xyz/entity/deterministic-measurement-and-correction-of-the-pad-shape-in-full-aperture-polishing-processes
MLA “Deterministic measurement and correction of the pad shape in full-aperture polishing processes.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/deterministic-measurement-and-correction-of-the-pad-shape-in-full-aperture-polishing-processes.
BibTeX @misc{4ortxyz_deterministic-measurement-and-correction-of-the-pad-shape-in-full-aperture-polishing-processes_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Deterministic measurement and correction of the pad shape in full-aperture polishing processes}}, year = {2026}, url = {https://4ort.xyz/entity/deterministic-measurement-and-correction-of-the-pad-shape-in-full-aperture-polishing-processes}, note = {Accessed: 2026-05-24}}
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